300mm PET Film Target

Polyester Film Target
12" x 12" x 0.007" (L x W x D)
300mm x 300mm x 0.018mm

In stock
SKU
300mm-CT-PET
US$109.06

Maximum 200 characters

Maximum 500 characters

All of our standard resolution photoplotted films are imaged and processed using the latest high-tech technology, which is a fully automated process allowing us to queue and image films whatever part of the day - or night. This automation helps to improve quality by reducing handling - and of course means that we have a high capacity in production..

BASE MATERIAL

All of our photomask films are imaged onto Agfa Idealine HPF (High Resolution Plotter Film) 0.18mm thick polyester film which has a photographic emulsion coated onto one side. These are specially manufactured for high resolution and consistent high quality results. They are both imaged, and inspected, in controlled environments which is crucial to their dimensional stability. For the most accurate films possible, please use this films in an environment of 21 deg C and 50% humidity.

RESOLUTIONS

We can write masks at 4 different resolutions, called "grades". The higher the resolution, the better the qualtity. Please see the section SPECIFICATIONS to see the impact that class resolution has on dimensional accuracy and feature tolerances.

Grade 1 :   This represents a resolution that is previously known as LOW Resolution. Although this resolution may resolve smaller features, we recommend keeping feature sizes above 50um as corner rounding is considerable. Edge sharpness and definition is acceptable for non critical design types, although designs with arcs/circles and lines running off 90 degree grid may show pixilation. NO features such as lines / circles / spots / squares below 30 um unless on a 'best effort' basis previously agreed with our technicians.    

Grade 2 :   This represents a resolution that is previously known as MEDIUM Resolution. This resolution will usually resolve down to 25 micron lines with decent line edge qualities with only a slight pixilation along edges. Corner rounding is still noticeable under magnification. NO features such as lines / circles / spots / squares below 25um unless on a 'best effort' basis previously agreed with our technicians.  

Grade 3 :   This represents our most common resolution, and is previously known as HIGH Resolution. It offers an excellent price / quality balance. This resolution will resolve down to 12 micron lines and has very good  line edge qualities with little pixilation along edges, although some circles / squares and spots may have some distortion to them. Corner rounding is usually acceptable at this level.

Grade 4 :   This represents our highest resolution, and is previously known as both SUPER HIGH and Premier , and is excellent for demanding, high precision photomasks. It is equivalent to our older  128k / 200k dpi films, and is the best quality that we can offer. This resolution will resolve down to 5 micron lines and has good line edge qualities with no pixilation along edges, and corner rounding is only noticable under very high magnification. Note that where feature sizes are below 10um, the design cannot contain mixed negative and positive data.

 

CAD FORMAT


Data formats listed above are only a small section of what is available. If your chosen format is not listed, please contact us for further information and clarification. We are also able to provide a full drafting service whereby we can create your designs from drawings and descriptions.

PRODUCTION SCHEDULE

Our standard production turnaround is 3-4 days from receipt of the artwork, purchase order and related documents. We generally send checkplots with every order, and it is vital that these are replied to within a short delay in order that we can meet the schedule required. The production schedule assumes the original data package is correct and does not need to undergo revisions or changes. For large volume orders, or large photomasks on high resolutions, please enquire before ordering premium services.

Standard (3-4 days) :   This is our standard service, and whilst we get 99% of orders shipped within this period, these are guidelines only and may change in periods of high demand. Where data packages are good, and all paperwork is completed promptly, we can often ship early.  Expected return of checkplot by customer is within 4 hours. Any orders received after 1pm will assume day 1 to be the following day.   

2 Days :   A premium service. A complete manufacturing package (data/instructions/order) must be with us by no later than 11.00am. Expected return of checkplot by customer is within 1 hour.

Sameday:   A premium service. A complete manufacturing package (data/instructions/order) must be with us by no later than 9.30am. Does not include GRADE 4 products, or photomasks bigger than 15" x 12". Expected return of checkplot by customer is within 30 mins.

5 Days + :   This is a discounted service for orders that are not urgent. Note that typical schedule is 5-10 days .

 

 

Film Polarity Orientation Photomask   POLARITY

Masks are normally referred to as Clearfield (positive) &  Darkfield (negative)

Positive means that the data you have drawn in CAD will be Emulsion on the mask, with the background (the field) being clear polyester.

Negative is the opposite of this, where the items drawn on CAD will be clear and the background will be emulsion. 

We also need to know which way round the mask has been designed on your screen. The easiest way to select this is to add some reference text (anything you like) to the design somewhere - maybe in the corner - and then specify if the text needs to be right reading or wrong reading.



INSPECTION

Standard :   We firstly inspect the piece by eye for flaws, design inaccuracies and contaminations. We also inspect a test coupon (placed in the bottom corner of the mask) for line width accuracy and edge definition. Next we measure the overall dimension of the mask, and record both of these measurements on our internal inspection records. Finally, we find the CD of the mask, measure that, record it, and also take a digital photo that is saved with the inspection log. We use Nikon MM40 at 900x magnification and an OGP ZIP 300 at 400 x magnifications for this.

Enhanced :   In addition to the standard inspection process described above, we will then document them via a Certificate of Conformance which we supply with the mask. Tolerances are per our standard tolerances.

Full Certificate :   By selecting this option during the ordering process, we will inspect upto 10 customer defined measurements, with customer supplied tolerances. You will need to send us a document, or a separate layer of the design, showing us where you want us to take the measurements from. There can be upto 10 positions defined by the customer. These dimensions are then programmed on the co-ordinate measuring system and the mask is compared to this unique program. A certificate of conformity is given if the mask passes the inspection process.

OPTIONS

Artwork Protection Film :   APF is a laminated film that is applied to the emulsion side of the film, creating a barrier protection. This not only provides a mechanical barrier to protect the film from scratches, abrasions, pinholes and contaminants such as inks and resists, but it also creates an easy to clean surface that is antistatic and repels most airborne particles. APF also help prevent chemical damage to photo-plotted films that may occur during use, handling, storage and even cleaning. The powerful barrier protection, both clear and thin, offers high light transmission and low haze. IMPORTANT NOTE: Because this adds a clear barrier between the film and the substrate, you may need to adjust exposures and contact methods due to possible under/over exposure. In effect, this turns a "contact" print into a "proximity" print.

White Backing :   We can add a polymer coating by screening method the either the front or reverse side of the film to give the appearance of black emulsion on photographic white paper. Other colours may be available (please ask)

Silver Backing :   A high reflective silver "mirror" can be laminated to the reverse side of the film. In fact, we can laminate any vinyl pattern or colour as you require.

 

 

Please see the TECHNICAL sections, DOWNLOAD sections and FAQ for further information. If you still require clarification, please either email or click for LIVE SUPPORT.

FEATURE TOLERANCES

There are two different values that we specify for tolerances. The first is a ‘feature tolerance’, which equates to one specific feature (also known as CD or Critical Dimension). So, if part of your mask design has a 12um channel and this is a critical feature, you can use the table below to work out possible deviations to the channel width, depending upon which resolution you choose. As a rule, the higher the resolution, then the more accurate the individual feature size will be.

 

Resolution

 

Material

Tolerance

GRADE 1

16k dpi on polyester film

4.8um + 10% host
Max 9.6um

GRADE 2

32k dpi on polyester film

2.4um + 10% host
Max 4.8um

GRADE 3

64k dpi on polyester film

1.2um + 10% host
Max 2.4um

GRADE 4

128k dpi on polyester film

0.6um + 10% host
Max 1.2um

                                All figures above in Microns....
                                Example, at grade 3 resolution a 10um line would have a tolerance of (1.2 + 0.1) = 1.3

 

DIMENSIONAL TOLERANCES

The second tolerance that customers ask us about is that of overall dimensional tolerances. These refer to the tolerances over a distance greater then 5mm – in layman’s terms, people ask us ‘how accurate will the mask be’ and these guidelines should go somewhere towards providing the tolerances in overall dimensions ,depending upon the resolution chosen. Again, it goes without saying that the higher the resolution, then the more accurate the final mask.

Our photo-mask films are produced in conditions of 21deg C / 50% humidity, and if dimensional accuracy is a concern when using the polyester mask, then you must replicate these conditions in your own clean rooms and acclimatise the mask in these conditions for upto 8 hours before you intend to use it – only then can it be considered to be dimensionally accurate and stable. We strongly recommend using glass based substrates where dimensional stability is a concern.

NOTE: 

When using films in your own production environemnt, be aware that ....
1 Deg C temperature change = 18 ppm (1.8um per metre length)
1% Humidity change  = 9ppm (0.9um per metre)

 

Resolution

 

Microns

 

where L is measuring length in MM and the resulting
figure is in microns.

 

High Resolutions
GRADE 1 - 4

= 10.0um + (Lmm * 0.005) um 

Low Resolutions
4k / 10k

= 20.0um + (Lmm * 0.010) um

                                All figures above in Microns.... 
                                Example, at Grade 3 resolution a 100mm line would have a tolerance of (10.0 + 0.5) = +/- 10.5um
                                Our imaging process is accurate to +/- 5um, the remainder of the tolerance is due to environmental controls.

 

SPECIFICATION

Polyester Film is a typical substrate used in the photographic process, and forms the most common substrate in applications that involve general multiple exposures (such as PCBs, etching, printing etc.). Polyester is excellent due to its low-cost nature, but must be handled carefully and used in controlled environments if dimensional accuracy is required.

Films used for photo-masks have the following component layers:  a plastic base, a photosensitive emulsion layer (silver halide) and a backing layer.

This plastic base is polyester material, and has a thickness of 0.18 mm. The emulsion layer is composed of gelatine and silver halide and other chemicals, which adds another 0.005mm in total.

When we expose the film in the imager, the light energy from the laser interacts with the silver halide crystals suspended in the coated gelatine layers. Development, a chemical process, converts exposed silver halide grains into metallic silver. The next step in the chemical process is fixation. The fixer stops development and removes the unexposed silver halide grains in non-image areas. Finally, the film is washed/dried/cleaned and inspected.

The final result is a ‘black’ image coated on one side of the polyester base. The density of the film is very high, typically Dlog of 4.5 – 5, giving it an excellent opacity to all common light sources.

Two concerns with emulsion film over glass are stability and robustness. Both the polyester and the gelatine absorb moisture and heat from their surroundings, and as such they undergo dimensional changes – quite considerably for some large area films. The other problem with the Gelatine/Emulsion is that it is relatively soft and must be handled carefully to avoid damage and scratches.

 

polyester film transmission


 

polyester specifications

 

FAQ's

 

Q: What is the smallest feature that you can do ? 
A: This depends upon the resolution that we image at, the tone of the photomask, and most importantly the feature type (Spot, square, line etc). This all makes it very hard to give a figure, but as a very rough guide we can make 8 -10 um using class 128 and down to 3 - 4um with our PREMIER range.

Q: How accurate are the features, what tolerances do you work to ? 
A: This is dependant upon the resolution that we image the photomask at. The QUICK REFERENCE brochure in the DOWNLOADS section will give you a chart, specifying both feature and dimensional tolerances.

Q: What resolution should i pick ? 
A: The higher the resolution, then the sharper the edges of the features, the smaller the features possible, the more accurate the features will be, the sharper the corners in of the features, and also the smoother the circles. Some customers will notice this difference straight away, some will hardly notice any difference. Every customer has different requirements and different priorities. If in doubt, chose a higher resolution to ensure your requirements are met, but we are happy to advise if you send us your design.

Q: What does the term POLARITY and FIELD mean ?
A: Polarity is the tone of the photomask, and in layman terms this can be thought of as Positive or Negative of the photomask. When you draw your photomask design, polarity determines whether the features on the mask are CLEAR or DARK on the final plate. The field refers to the background tone of the mask. So, a DARKFIELD mask would have the items you have drawn as CLEAR, with the background of the mask as DARK. Obviously this is the opposite for CLEARFIELD, where the field behind is clear and the design features are DARK. Remember, this is polarity or tone of the mask that we manufacture, and NOT the polarity of the wafer you are using. If used in contact lithography, the tone of the photoresist that you use will also affect which polarity to order.

Q: I've designed my mask with the wrong polarity - what do i do ? 
A: We can use the original design file and simply reverse the tone of the photomask. This is much easier than supplying new data.

Q: What is Right Reading, Wrong Reading and Mirrored.
A: Right Reading Emulsion side Down is a common way to describe a photomask that will be used for contact lithography. When you hold the mask in your hands with the emulsion side facing down closest to the wafer, the image on the mask will be correct (right reading) or how it should appear on the wafer. This is equivalent to Wrong Reading Emulsion side Up. For us to make this happen we have to Mirror the image of your photomask before we write it.

 

 

PDF Download

Product Data Sheet

 

 

 

PDF Download

How To Order Photomasks

 

 

 

PDF Download

Designing Your Photomask - a Guide

 

 

 

PDF Download

Material Specifications for standard photomasks

 

 

 

PDF Download

Dimensional Stability of Film v Glass photomasks

 

 

 

PDF Download

Photomasks - The Complete Guide

 

 

 

PDF Download

Quality Assurance Certificate