SL10 Exposure Pattern Test Target
SL10 Test Exposure Pattern
75mm x 75mm x 1.5mm
Available on Soda Lime or Quartz
Introducing our Chrome on Glass Resolution Test Pattern—a cutting-edge tool meticulously engineered for precise evaluation of optical systems and imaging devices. This advanced test pattern showcases a diverse array of features, including lines, rectangles, and concentric circles, strategically arranged for comprehensive resolution testing.
KEY TECHNICAL FEATURES
-
Multifaceted Geometric Design: Our resolution test pattern encompasses a range of geometric shapes—lines, rectangles, and concentric circles. This diversity allows for a comprehensive assessment of imaging capabilities, ensuring accurate evaluation of resolution across different features.
-
90-Degree Rotational Duplication: Enhancing the thoroughness of analysis, lines within the pattern are duplicated with a 90-degree rotation. This unique feature provides a nuanced evaluation of imaging system sensitivity to directionality, enabling a more detailed understanding of performance characteristics.
-
Negative Duplication: The entire test pattern is duplicated in negative, providing a holistic examination of an optical system's response to positive and negative features. This feature is instrumental in assessing contrast and overall imaging performance.
-
Micron-Level Resolution Range: Tailored to meet diverse industry needs, our test pattern offers a resolution range spanning from 5um to 35um. This versatility makes it suitable for applications in microimaging, lithography, and other precision imaging systems.
-
Specialized High-Resolution Version: For applications demanding the utmost precision, we offer a special high-resolution version featuring lines as narrow as 1um. This version is particularly well-suited for industries where fine details and microscopic resolution are critical, such as semiconductor fabrication and micro-optics.
-
Chrome on Glass Construction: Manufactured using the Chrome on Glass technique, our test pattern ensures durability, optical clarity, and consistent performance. This construction method guarantees stability, making it an ideal tool for repeated use in laboratories and manufacturing environments.
CONFIGURATION
- Material: Soda Lime Glass
- Pattern: Low Reflective Chrome
- Size: 3" x 3" (76mm x 76mm)
- Thickness: 0.060" (1.5mm)
PATTERN DESCRITION
Containing lines, concentric rectangles,and concentric circles. The lines pairs contain line width and spaces in reducing sizes, starting with 100um and reducing down to 5um line and space. The whole patterm is then duplicated with a 90 degree rotation. Concentric circles are drawn with both 10um and 5um line/space, and the concentric rectangles are drawin from 200um line down to 5um line. The whole pattern is then reproduced again as negative, making this pattern suitable for control of exposures.
A special High resolution version is available, which continues sequentially the line/space pairs from 5um down to 1um. These extra features are only available one polarity (dark or clear), so upon ordering you must select which version you need. "Clear" would be definded as clear lines within an opaque background, commonly called "negative", and "dark" would be the opposite - so chrome lines. Note that this choice only concerns the features from 5 > 1 um , all other features on the plate will reamin in both polarities.
- SL10: Standard pattern
- SL10-1: High resolution, 1um clear (transparent) features
- SL10-2: High resolution, 1um dark (chrome) features
BASE MATERIAL
As standard products, these are available on Soda Lime glass with a low reflective chrome pattern etched onto the surface. The chrome material, when viewed from the top surface, will have an oxide layer (CrO) to reduce light reflections. Please enquire if you need this on different material substrates, such as Fused Silica (Quartz) or Film
TURNAROUND
Our standard production turnaround is 5 days from receipt of order. We can offer faster services if required for more urgent orders.
INSPECTION
STANDARD: We inspect the piece by eye for flaws, design inaccuracies and contaminations. We measure the design to check that it conforms to the specifications, and record both of these measurements on our internal inspection records. Finally, we find the CD of the mask, measure that, record it, and also take a digital photo that is saved with the inspection log. We use Nikon MM40 at 900x magnification and an OGP ZIP 300 at 400 x magnifications for this.
CERTIFICATE OF CONFORMANCE: In addition to the standard inspection process described above, we will then document them via a Certificate of Conformance . Tolerances are per our standard tolerances.
CERTIFICATE OF MEASUREMENT: A combined conformance and measurement certificate. Upto 10 individual line/dot width and line/dot pitch to be measured . Tolerances are per our standard tolerances.
Please see the TECHNICAL sections, DOWNLOAD sections and FAQ for further information. If you still require clarification, please either email or click for LIVE SUPPORT.
CHROME SPECIFICATION
The majority of our standard chrome on glass targets are made on soda lime glass, with a low reflective oxide coating (11% reflectivity at 436nm wavelengths). They are made at high presicion, using a photolithographic method, ensuring the very best quality. The Optical Density of the chrome is >2.8 in the UV bandwidth, and the chrome is coated to approx 0.1um thick. The side of the chrome that is against the glass (the underneath face) remains high reflective with no oxide. Alternative thickness, reflectivity and colour are available on demand. Please see the download section for charts.
MATERIAL SPECIFICATION
Soda Lime Glass is the most common substrate used for masks, due to its good quality/price ratio. The glass is optically good, very flat and has no imperfections. If used in a photo-lithographic process, glass can be used with a very wide variety of light sources from 350nm upwards, with an excellent UV transparency. Soda Lime glass has a thermal co-efficient expansion of 93 (10-7) which is approximately 10 ppm (parts per million) , and a transmittance value of 88% at 375-450nm, with a glass flatness class of 5um for the smaller plates and 10um for the larger plates. Some of the very big plates of 14" and above, may have a bigger flatness tolerance.
Quartz or sometimes called Fused Silica is equally a very good substrate, and probably the most common for ‘high-end’ applications such as semiconductor chips. There are a couple of mechanical benefits of quartz over standard soda lime glass – firstly the quartz material is optically pure, with a very high transmission of light even at very low wavelengths of down to 175nm. The second major benefit of quartz is that it remains dimensionally stable even in extreme temperatures, with a thermal co-efficient expansion of 0.4 ppm. Quite often, quartz is the chosen substrate used in laser ablation applications, firstly because of the short wavelengths that are used to ablate with, and secondly because mechanically it can cope with higher temperature fluctuations without damage.
- Quartz Optical transmission of visible light = 94%
- Soda Lime Optical transmission of visible light = 88%
- Quartz Optical transmission minimum wavelength = 180nm
- Soda Lime Optical transmission of visible light = 375nm
- Quartz thermal expansion co-efficient = 0.4 ppm
- Soda Lime thermal expansion co-efficient = 10ppm
FREQUENTLY ASKED QUESTIONS
Q: The pattern doesnt represent what i need - can we alter it as a special design?
A: Yes ....The patterns here are standard products, but we can certainly transfer almost any design to the slide (Note the price will change accordingly)
Q: How long from order to dispatch?
A: Typically we have these products in stock on the shelf - however, it may take upto 5 days before they are dispatched. If you need the product more urgently, please contact us direct and we will do our best !
Q: Can you send me a scaled picture showing the detail in higher resolution?
A: Certainly, we have higher resolution graphics that we can email you. Please contact us via the Live Support or by Email.
Q: Can I have different materials?
A: Yes. Our standard products are Low Reflective Chrome on Soda Lie glass or Polyester Film - but we can offer different base material (Quartz, Borofloat etc) and different masking materials (Aluminium, ITO, Gold etc), as well as simply different thicknesses of glass. There will be minimum order quantities for most of these special materials.
